ABSTRACT
Recent technological innovations in electronics and photonics are now enabling THz research to be realized in defence as well as civil sectors. Undoubtedly, microfabricated vacuum electron devices (MVEDs) are capable to fulfil the source requirement. In last couple of years, development of high definition electromagnetic simulation codes, advancement in micro-&-nano fabrication and further characterization techniques, development of high current density hot (thermionic) and cold (CNT and FEA) emitters, and progress in ultra-high vacuum window research have been the driving force behind the extraordinary development in MVEDs. In this article, the importance of THz region and need of THz MVEDs are presented. Furthermore, fabrication approaches of promising planar microfabrication compatible slow-wave structures, high current density electron beam generation for THz MVEDs have been reviewed. Finally, state-of-the art THz MVEDs and future trends are discussed.
